Powerful magnets for micro applications
- Fully integrated
- Customized shapes and sizes
- Batch fabrication
- Resource efficient
- Powerful permanent micro magnets
- Magnetic MEMS
- GRENOBLE INP
MagnetFab proposes a technology to integrate high performance NdFeB permanent magnets into microsystems
High rate sputtering is used to deposit thick NdFeB films. Clean room techniques (lithography, DRIE, polishing) are exploited to define the final size and shape of the high performance micro magnets.
Compared to bulk NdFeB magnets: much smaller sizes achievable (factor 10 to 100), no loss in magnetic properties, no materiel waste, fully integrated in the microsystemsCompared to electrodeposited permanent magnets: much improved magnetic properties (coercivity and energy products - factor 10 to 100).
State of progress
Fabrication of 50 µm thick magnets mastered. First working prototype MEMS have been developed.
µ-actuators, µ-generators (energy harvesters), µ-motors, µ-sensors