Plane-view optical images (a,b) of a 50 µm thick NdFeB film deposited on a pre-patterned 100 mm Si substrate together with a cross-sectional scanning electron microscope image (c) of a few micro-magnets and a Magneto-Optical image of the stray magnetic field produced above a part of the film (d).
MicroMagFab proposes a technology to integrate high performance NdFeB permanent magnets into microsystems
High rate sputtering is used to deposit thick NdFeB films. Clean room techniques (lithography, DRIE, polishing) are exploited to define the final size and shape of the high performance micro magnets.
Compared to bulk NdFeB magnets: much smaller sizes achievable (factor 10 to 100), no loss in magnetic properties, no materiel waste, fully integrated in the microsystems
Compared to electrodeposited permanent magnets: much improved magnetic properties (coercivity and energy products – factor 10 to 100).
Fabrication of 50 µm thick magnets mastered. First working prototype MEMS have been developed.
µ-actuators, µ-generators (energy harvesters), µ-motors, µ-sensors