MICROMAGFAB
Powerful magnets for micro applications
Benefits
- Fully integrated
- Customized shapes and sizes
- Batch fabrication
- Resource efficient
Key words
- Powerful permanent micro magnets
- NdFeB
- Magnetic MEMS
Partnerships & Rewards
- Fonds FEDER - Région Auvergne Rhône Alpes
Laboratory
- NEEL
Institutions
- CNRS
- GRENOBLE INP-UGA
- UGA
Linksium Continuum
- Maturation
- Incubation
Context
MicroMagFab proposes a technology to integrate high performance NdFeB permanent magnets into microsystems
Technology
High rate sputtering is used to deposit thick NdFeB films. Clean room techniques (lithography, DRIE, polishing) are exploited to define the final size and shape of the high performance micro magnets.
Advantages
Compared to bulk NdFeB magnets: much smaller sizes achievable (factor 10 to 100), no loss in magnetic properties, no materiel waste, fully integrated in the microsystemsCompared to electrodeposited permanent magnets: much improved magnetic properties (coercivity and energy products - factor 10 to 100).
State of progress
Fabrication of 50 µm thick magnets mastered. First working prototype MEMS have been developed.
Applications
µ-actuators, µ-generators (energy harvesters), µ-motors, µ-sensors
